Data items · SECS Message Reference

ACKC10 B

Acknowledge Code, 1 byte.

Value	Meaning
0	Accepted for display
1	Message will not be displayed
2	Terminal not available
3-63	Reserved

Used by S10F2 S10F4 S10F6

ACKC5 B

Acknowledge code, 1 byte.

Value	Meaning
0	Accepted
>0	Error, not accepted (1-63 reserved)

Used by S5F2 S5F4

ACKC6 B

Acknowledge code, 1 byte.

Value	Meaning
0	Accepted
>0	Error, not accepted (1-63 reserved)

Used by S6F2 S6F12

ACKC7 B

Acknowledge code, 1 byte.

Value	Meaning
0	Accepted
1	Permission not granted
2	Length error. This module returns this value for two distinct situations: an undecodable PPBODY (not the agreed reference format), and transfer verification failure (SHA-256 hash mismatch, an incomplete remote read, or a transfer timeout). A host cannot tell from the code alone whether to resend a corrected PPBODY shape or re-stage the file - the two failures call for different next steps.
3	Matrix overflow
4	PPID not found
5	Mode unsupported
6	Command will be performed with completion signaled later
7	Storage limit error
>7	Other error (8-63 reserved)

Used by S7F4 S7F18

ALCD B

Alarm code byte: bit 8 = 1 means alarm set, = 0 means cleared; bits 7-1 are the alarm category (1=personal safety, 2=equipment safety, 3=parameter control warning, 4=parameter control error, 5=irrecoverable error, 6=equipment status warning, 7=attention flags, 8=data integrity, remaining values reserved).

Used by S5F1 S5F6 S5F8

ALED B

Alarm enable/disable code, 1 byte: bit 8 = 1 means enable alarm, = 0 means disable.

Used by S5F3

ALID I* / U*

Alarm identification.

Used by S5F1 S5F3 S5F5 S5F6 S5F8

ALTX A

Alarm text, limited to 120 characters.

Used by S5F1 S5F6 S5F8

CEED BOOLEAN

Collection event enable/disable code, 1 byte. TRUE = Enable, FALSE = Disable.

Used by S2F37

CEID A / I* / U*

Collected event ID.

Used by S1F23 S1F24 S2F35 S2F37 S2F55 S2F56 S2F58 S6F11 S6F15 S6F16

CENAME A

Collection event name.

Used by S1F24 S2F56

CEPACK L / U1

Command Enhanced Parameter Acknowledge. If the CPNAME in question defines CEPVAL as a LIST, CEPACK has the same structure; otherwise it is a single-byte integer.

Value	Meaning
0	No error
1	Parameter name (CPNAME) does not exist
2	Illegal value specified for CEPVAL
3	Illegal format specified for CEPVAL
4	Parameter name (CPNAME) not valid as used
5-63	Reserved

Used by S2F50

CEPVAL L / B / BOOLEAN / A / J / I* / F* / U*

Command Enhanced Parameter Value. May be a single (non-list) value, a list of single items of identical format, or a nested list of CPNAME/CEPVAL pairs. If a given CPNAME defines CEPVAL as a LIST it must always be a LIST, or it is a format error.

Used by S2F49

COMMACK B

Establish Communications Acknowledge Code, 1 byte.

Value	Meaning
0	Accepted
1	Denied, Try Again
2-63	Reserved

Used by S1F14

CPACK B

Command Parameter Acknowledge Code, 1 byte.

Value	Meaning
1	Parameter Name (CPNAME) does not exist
2	Illegal Value specified for CPVAL
3	Illegal Format specified for CPVAL
>3	Other equipment-specific error (4-63 reserved)

Used by S2F42

CPNAME A / I* / U*

Command Parameter Name.

Used by S2F41 S2F42 S2F49 S2F50

CPVAL L / B / BOOLEAN / A / J / I* / U*

Command Parameter Value.

Used by S2F41

DATAID A / I* / U*

Data ID.

Used by S2F33 S2F35 S2F39 S2F45 S2F49 S6F11 S6F16

DATALENGTH I* / U*

Total bytes to be sent.

Used by S2F39

DRACK B

Define Report Acknowledge Code, 1 byte.

Value	Meaning
0	Accept
1	Denied. Insufficient space.
2	Denied. Invalid format. This module also uses this value when the same S2F33 batch defines the same RPTID more than once.
3	Denied. At least one RPTID already defined.
4	Denied. At least VID does not exist.
>4	Other errors (5-63 reserved)

Used by S2F34

DSPER A

Data sample period. Format 1: hhmmss (6 bytes). Format 2: hhmmsscc (8 bytes, cc = centiseconds). Equipment shall support at least Format 1 and document which formats it accepts.

Used by S2F23 S2F64

DVID A / I* / U*

Data Variable identifier (or DVNAME). Recommend using DVID.

Used by S1F21 S1F22 S1F24

DVVALNAME A

A descriptive name for the data variable.

Used by S1F22

EAC B

Equipment acknowledge code, 1 byte.

Value	Meaning
0	Acknowledge
1	Denied. At least one constant does not exist
2	Denied. Busy
3	Denied. At least one constant out of range
>3	Other equipment-specific error (4-63 reserved)

Used by S2F16

ECDEF B / BOOLEAN / A / J / I* / F* / U*

Equipment constant default value.

Used by S2F30

ECID A / I* / U*

Equipment Constant ID.

Used by S2F13 S2F15 S2F29 S2F30

ECMAX B / BOOLEAN / A / J / I* / F* / U*

Equipment constant maximum value.

Used by S2F30

ECMIN B / BOOLEAN / A / J / I* / F* / U*

Equipment constant minimum value.

Used by S2F30

ECNAME A

Equipment constant name.

Used by S2F30

ECV B / BOOLEAN / A / J / I* / F* / U*

Equipment Constant Value.

Used by S2F14 S2F15

EDID B / A / I* / U*

Expected data Identification; e.g. when MEXP = "S07F03", EDID = <PPID>.

Used by S9F13

ERACK B

Enable/Disable Event Report Acknowledge Code, 1 byte.

Value	Meaning
0	Accepted
1	Denied. At least one CEID does not exist. This module also uses this value when the CEID list contains a non-numeric item, or a slot cannot be read as an identifier - the content parses but the value cannot be trusted, and the host-side remedy is the same as for a nonexistent CEID (check what was sent), so the same code is reused.
>1	Other errors (2-63 reserved)

Used by S2F38

FCNID U1

Function Identification.

Used by S2F43 S2F44 S2F60

GRANT B

Grant code, 1 byte.

Value	Meaning
0	Permission Granted
1	Busy, Try Again
2	No Space Available
3	Duplicate DATAID
>3	Equipment Specific Error Code

Used by S2F40

HCACK B

Host Command Parameter Acknowledge Code, 1 byte.

Value	Meaning
0	Acknowledge, command has been performed
1	Command does not exist
2	Cannot perform now. This module also uses this value when: (1) a remote command is refused by the control-state gate (equipment not in ONLINE/REMOTE); (2) the user-registered handler throws an exception; (3) the user's handler returns null. All three look the same to the host - retrying later is possible but not guaranteed to succeed.
3	At least one parameter is invalid
4	Acknowledge, command will be performed with completion signaled later by an event
5	Rejected, Already in Desired Condition
6	No such object exists
7-63	Reserved

Used by S2F42 S2F50

LENGTH I* / U*

Length of the service program or process program in bytes.

Used by S7F1

LIMITACK B

Acknowledgment code for variable limit attribute set, 1 byte.

Value	Meaning
1	LIMITID does not exist
2	UPPERDB > LIMITMAX
3	LOWERDB < LIMITMIN
4	UPPERDB < LOWERDB
5	Illegal format

Used by S2F46

LIMITID B

The identifier of a specific limit in the set of limits for a variable, 1 byte. Numbered consecutively from one.

Used by S2F45 S2F46 S2F48

LIMITMAX Boolean / A / I* / F* / U*

The maximum allowed value for the limit values of a specific variable, set by the equipment manufacturer.

Used by S2F48

LIMITMIN Boolean / A / I* / F* / U*

The minimum allowed value for the limit values of a specific variable, set by the equipment manufacturer.

Used by S2F48

LOWERDB Boolean / A / I* / F* / U*

The lower boundary of the deadband of a limit. Together with UPPERDB it defines one limit.

Used by S2F45 S2F48

LRACK B

Link Report Acknowledge Code, 1 byte.

Value	Meaning
0	Accepted
1	Denied. Insufficient space
2	Rejected: invalid format. The module also returns this when a report contains a <b>data variable</b> the event does not supply. A DVVAL is only guaranteed valid at the moment its collection event occurs (E30-0526 §7.3.2.3), so reading it under a different event gives the host a meaningless value and the whole batch is refused. Status variables and equipment constants are <b>not</b> restricted this way: §7.3.1.3.3.3 allows event reports to consist of SVs, ECs and DVs, and SV/EC values shall be current at all times.
3	Denied. At least one CEID link already defined
4	Denied. At least one CEID does not exist
5	Denied. At least one RPTID does not exist
>5	Other errors (6-63 reserved)

Used by S2F36

LVACK B

Variable limit definition acknowledge code, 1 byte. Defines the error with the limit attributes for the referenced VID.

Value	Meaning
1	Variable does not exist
2	Variable has no limits capability

Used by S2F46

MDLN A

Equipment model type, 20 bytes maximum. Same data as returned by S1,F2.

Used by S1F2 S1F13 S1F14

MEXP A

Message expected in the form SxxFyy where x is stream and y is function.

Used by S9F13

MHEAD B

SECS message block header associated with the message block in error.

Used by S9F1 S9F3 S9F5 S9F7 S9F11

OBJSPEC A

A text string that points to a specific object instance, formed from one or more "object type:identifier>" substrings; the object type may be omitted and the final ">" is optional.

Used by S2F49

OFLACK B

Acknowledge code for OFF-LINE request, 1 byte.

Value	Meaning
0	OFF-LINE Acknowledge
1-63	Reserved

Used by S1F16

ONLACK B

Acknowledge code for ON-LINE request, 1 byte.

Value	Meaning
0	ON-LINE Accepted
1	ON-LINE Not Allowed
2	Equipment Already ON-LINE
3-63	Reserved

Used by S1F18

PPBODY B / A / I* / U*

Process program body, describing in the equipment's own language the actions to be taken in processing the material.

This module does not transmit PPBODY per the literal definition: for S7F3/S7F6, PPBODY carries a by-reference pointer rather than the process program itself - the default encoding is L,2 { A path, A SHA-256 hex string } (ProcessPrograms.ReferenceFormat = List), or a single ASCII JSON string (= Json). The equipment fetches the actual file from a file server; it is not carried in the SECS message. This is not what SEMI E5 defines - it is a convention agreed between this module and the host.

Used by S7F3 S7F6

PPGNT B

Process program grant status, 1 byte.

Value	Meaning
0	OK
1	Already have
2	No space
3	Invalid PPID
4	Busy, try later
5	Will not accept
>5	Other error (6-63 reserved)

Used by S7F2

PPID B / A

Process program ID, limited to a maximum of 120 bytes. The format used is host-dependent; the equipment may treat it internally as an opaque binary pattern.

Used by S7F1 S7F3 S7F5 S7F6 S7F17 S7F20

RCMD A / I1 / U1

Remote command code or string.

Used by S2F41 S2F49

REPGSZ A / I* / U*

Reporting group size.

Used by S2F23 S2F64

RPTID A / I* / U*

Report ID.

Used by S2F33 S2F35 S2F52 S2F53 S2F54 S2F56 S6F11 S6F16

RSDA B

Request Spool Data Acknowledge.

Value	Meaning
0	OK
1	Denied, busy try later. This module also returns this value when there is simply nothing to transmit or purge (an unrecognized RSDC, or the spool not in the Active state) - it never sends 2 (spooled data does not exist). A host should not read 1 here as "retrying later will eventually succeed".
2	Denied, spooled data does not exist. This module never sends this value - every "nothing spooled" case returns 1 instead.
3-63	Reserved

Used by S6F24

RSDC U1

Request Spool Data Code.

Value	Meaning
0	Transmit Spooled Messages
1	Purge Spooled Messages
2-63	Reserved

Used by S6F23

RSPACK B

Reset Spooling Acknowledge.

Value	Meaning
0	Acknowledge, spooling setup accepted
1	Spooling setup rejected. E5 defines only "accept" and "reject" - no partial acceptance. This module rejects the entire batch if any single stream in it is rejected.
2-63	Reserved

Used by S2F44

SHEAD B

Stored header related to the transaction timer.

Used by S9F9

SMPLN I* / U*

Sample number.

Used by S6F1

SOFTREV A

Software revision code, 20 bytes maximum.

Used by S1F2 S1F13 S1F14

STIME A

Sample time, 12 or 16 bytes, or Extended format as specified by the TimeFormat equipment constant value setting. A zero-length item means no value is given and the time is to be derived from SMPLN.

Used by S6F1

STRACK B

Spool Stream Acknowledge, explaining why a particular stream's spooling setup was rejected (used in the S2F44 error list).

Value	Meaning
1	Spooling not allowed for stream (i.e., Stream 1)
2	Stream unknown
3	Unknown function specified for this stream
4	Secondary function specified for this stream

Used by S2F44

STRID U1

Stream Identification.

Used by S2F43 S2F44 S2F60

SV L / B / BOOLEAN / A / J / I* / F* / U*

Status variable value.

Used by S1F4 S6F1

SVID A / I* / U*

Status variable ID. Status variables may include any parameter that can be sampled in time, such as temperature or quantity of a consumable.

Used by S1F3 S1F11 S1F12 S2F23 S2F64

SVNAME A

Status Variable Name.

Used by S1F12

TEXT B / A / 2-byte character / I* / U*

A single line of characters.

Used by S10F1 S10F3 S10F5

TIAACK B

Trace Initialize acknowledgement code, 1 byte.

Value	Meaning
0	Everything correct
1	Too many SVIDs
2	No more traces allowed
3	Invalid period
4	Unknown SVID specified
5	Invalid REPGSZ
6-63	Reserved
>63	Equipment specified error. This module uses 64 in this range for "TOTSMP exceeds this module's per-trace sample cap" - E5 has no dedicated code for an oversized TOTSMP, and reusing 5 (invalid REPGSZ) or 2 (no more traces) would mislead the host, so a dedicated equipment-specific value is used instead.

Used by S2F24

TIACK B

Time Acknowledge Code, 1 byte.

Value	Meaning
0	OK
1	Error, not done
2-63	Reserved

Used by S2F32

TID B

Terminal number, 1 byte: 0 = single or main terminal, >0 = additional terminals at the same equipment.

Used by S10F1 S10F3 S10F5

TIME A

Time of day: 12 or 16 bytes, or Extended format as specified by the TimeFormat equipment constant value setting.

Used by S2F18 S2F31

TOTSMP A / I* / U*

Total samples to be made; 0 stops the trace.

Used by S2F23 S2F64

TRID A / I* / U*

Trace request ID.

Used by S2F23 S2F62 S2F63 S2F64 S6F1

UNITS A

Units Identifier, as allowed by SEMI E5, §12.

Used by S1F12 S1F22 S2F30 S2F48

UPPERDB Boolean / A / I* / F* / U*

A variable limit attribute defining the upper boundary of the deadband of a limit. Format and units match the monitored variable.

Used by S2F45 S2F48

V L / B / BOOLEAN / A / J / I* / F* / U*

Variable data.

Used by S6F11 S6F16

VID A / I* / U*

Variable ID.

Used by S2F33 S2F45 S2F46 S2F47 S2F48 S2F54

VLAACK B

Variable Limit Attribute Acknowledge Code, 1 byte.

Value	Meaning
0	Acknowledge, command will be performed
1	Limit attribute definition error
2	Cannot perform now
>2	Other equipment-specific error

Used by S2F46