SECS Message Reference
SEMI E30-0526 / SEMI E5-0725
- Implemented 99
- Not implemented 33
132 messages, 79 data items.
By stream
Implemented · Partial · Not implemented
| Stream | Functions (colour shows implementation status) |
|---|---|
| S1 | 1 2 3 4 11 12 13 14 15 16 17 18 21 22 23 24 |
| S2 | 13 14 15 16 17 18 23 24 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 |
| S5 | 1 2 3 4 5 6 7 8 |
| S6 | 1 2 5 6 11 12 15 16 19 20 23 24 |
| S7 | 1 2 3 4 5 6 17 18 19 20 23 24 25 26 27 28 29 30 |
| S9 | 1 3 5 7 9 11 13 |
| S10 | 1 2 3 4 5 6 7 |
| S21 | 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 |